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Plasma Chemistry III by S. Veprek, M. Venugopalan

By S. Veprek, M. Venugopalan

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Bindley, T. : Trans. Faraday Soe. 58, 217 (1962) 50. Stillc, J. , Sung, R. : J. Org. Chem. 30, 3116 (1965) 51. Gilbert, R. : J. Phys. Chem. 80, 1017 (1976) 52. Degenkolb, E. O. : Appl. Spectrosc. 30, 520 (1976) 53. Harshbarger, W. R. : Appl. Spectrosc. i:Mogab, C. : J. Electrochem. Soc. 124, 1262 (1977) 55. Mogab, C. J,, Shankofl, T. : J. Electrochem. Soc. I24, 1766 (1977) 56. Mogab, C. , Adams, A. , Flamm, D. : J. Appl. Phys. 49, 3796 (1978) 57. Curtis, B. , Brunner, H. J. : J. Electrochem. Soc.

IBM J. Res. & Develop. 23, 33 (1979) 86. Bersin, R. , Reichelderfer, R, F. : SOlid State Technol. 20(4), 78 (1977) 87. Winters, H. " J. Appl. Phys. 49, 5165 (1978) 88. , Takehara, Y. : Japan J. Appl. Phys. 16, 175 (1977) 89. : ibid. 17, 235 (1978) 90. , Ojha, S. M. : Vacuum 26, 53, 233 (1976) 91. : J. Vac. Sci. Technol. 14, 5 (1977) 92. Mauer, J. L. : ibid. 15, 1734 (1978) 93. Hanak, J. , Pellicane, J. : ibid. 13, 406 (1976) 94. Cuomo, J. : ibid. 15, 281 (1978) 95. Schaible, P. , Metzger, W. : J.

Amer. Chem. Soc. 99, 6780 (1977) 123. : J. Appl. Phys. 49, 5617 (1978) 124. Tibbit, J. , Bell, A. : J. Macromol. -Chem. AIO, 519 (1976) 125. : J. Appl. Phys. 1980 in press. 78. 79. 80. 81. 82. 83. 42 The Mechanism and Kinetics of Plasma Polymerization Alexis T. Bell Department of Chemical Engineering, University of California, Berkeley, CA 94720 Table of Contents . . . . . . . . . . . . . . 44 2 Reactor Configurations . . . . . . . . . . . . 44 3 Physical Characteristics of the Plasma .

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