By M Born
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2 Ceramics for MEMS Sensors Piezoelectric lead–zirconate–titanate (PZT) ceramics are widely used in the design of MEMS sensors and actuators capable of operating under harsh environments. These materials can be manufactured according to prescribed aspect ratios and are capable of satisfying multimode operations such as radial mode, thickness extension mode, length extension mode, and length/thickness extension mode. Important properties of PZT materials are elastic constants, dielectric constants, and electromechanical coupling factors as a function of temperature, sample geometry, frequency, and crystal structures of soft and hard PZT materials.
Deployment of NT in the development of projectiles will eliminate field-reliability problems and will significantly improve the target kill probability. Requirements for structural materials, sacrificial materials, and etchant techniques in the fabrication of MEMS devices are dependent on the operating frequency, wavelength, bandwidth, performance, and reliability specifications. 3. 2 Types of Nanostructures and Their Properties Nanomaterial requirements for nanostructures will vary from application to application.
R. 2008 1:20pm Compositor Name: JGanesan MEMS and Nanotechnology-Based Sensors and Devices have diameters of few nanometers and are very flexible. Nanotube arrays normally do not maintain their shape because they are held together by weak forces. But the latest procedure developed at RPI allows them to grow them in an array on a separate platform and then fill the array with soft polymer. When the polymer hardens, a flexible skin with embedded-organized arrays of annotates is achieved. This skin can be bent, flexed, and rolled up like a scroll, all the while maintaining their ability to conduct electricity with minimum loss.